Document Type : Original Article

Author

• Somayeh Asgary

Department of Physics, West Tehran Branch, Islamic Azad University, Tehran, Iran.

Abstract

Diamond structure were deposited on gold coated Si substrate successfully using DC-PECVD technique at different CH4 /H2 in the reactant gases (CH4/H2 = 2, 5 and 7 vol. %). Characterization of diamond structure has been investigated in detail by X-ray diffraction (XRD), Raman spectroscopy (RS), atomic force microscopy (AFM) and scanning electron microscopy (SEM). The results determined the effect of the different CH4 /H2 in the reactant gases on the crystallinity, phase, surface morphology and microstructure. The XRD patterns showed polycrystalline structure with diamond (111) preferred growth orientation and better crystalline quality at middle methane concentrations. The first order Raman peak for diamond phase was more intense at middle methane concentrations, while a relatively broad G-band from the graphitic species was appearance. Diamond structures with large grain sizes in the micron or tens of micron range have homogenous surface.

Keywords

• Diamond structure
• PECVD method
• Raman
• XRD

Main Subjects

• Condensed Matter Film Behavior

Article Title [Persian]

سنتز ریزساختار الماس و مواد مرتبط در CH4/H2 مختلف در گازهای واکنش دهنده

Author [Persian]

• سمیه عسگری

گروه فیزیک، دانشگاه آزاد اسلامی واحد تهران غرب، تهران، ایران.

Abstract [Persian]

ساختار الماس با استفاده از روش DC-PECVD در CH4/H2 مختلف در گازهای واکنش دهنده (CH4/H2 = 2، 5 و 7 حجم درصد) با موفقیت بر روی زیرلایه Si پوشش داده شده با طلا انباشت شد. خصوصیات ساختار الماس با پراش پرتو ایکس (XRD)، طیف‌سنجی رامان (RS)، میکروسکوپ نیروی اتمی (AFM) و میکروسکوپ الکترونی روبشی (SEM) به تفصیل بررسی شده است. نتایج اثر CH4 / H2 مختلف در گازهای واکنش دهنده را بر کریستالی، فاز، مورفولوژی سطح و ریزساختار تعیین کرد. الگوهای XRD ساختار چند کریستالی با جهت گیری رشد ترجیحی الماس (111) و کیفیت کریستالی بهتر در غلظت های متوسط ​​متان را نشان دادند. پیک مرتبه اول رامان برای فاز الماس در غلظت‌های متوسط ​​متان شدیدتر بود، در حالی که یک باند G نسبتاً وسیع از گونه‌های گرافیتی ظاهر شد. سازه های الماس با اندازه دانه های بزرگ در محدوده میکرون یا ده ها میکرون دارای سطح همگن هستند.

Keywords [Persian]

• ساختار الماس
• روش PECVD
• رامان
• XRD

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