مجله فصل مشترک ها، لایه های نازک و سیستم های با بعد کم
همبستگی رفتار دمایی و خواص ساختاری، اپتیکی و الکتریکی لایه های نازک نیترید تیتانیوم
نوع مقاله : مقاله پژوهشی
نویسندگان
گروه فیزیک، دانشگاه آزاد اسلامی واحد تهران غرب، تهران، ایران.
چکیده
لایه‌های نازک قلع با روش کندوپاش مگنترون DC تهیه شد و تأثیر عملیات بازپخت بر روی خواص فیزیکی، ساختاری، ریخت‌شناسی و نوری لایه‌های قلع با پراش اشعه ایکس (XRD)، میکروسکوپ الکترونی روبشی (SEM)، میکروسکوپ نیروی اتمی (AFM) و اسپکتروفتومتر UV-VIS بررسی شد.تغییر مقاومت الکتریکی و سختی فیلم نیز مورد بررسی قرار گرفته است. بر اساس نتایج XRD، افزایش دمای بازپخت در استوکیومتری فیلم تغییری نکرد، اما کیفیت کریستالی فیلم را بدتر کرد. فیلم انباشت شده با ساختار آمورف به یک ساختار کریستالی تک فازی که جهت‌گیری ترجیحی در امتداد (111) دارد و ساختار پلی کریستالی در دمای بازپخت بالاتر تغییر یافت. با توجه به تصاویر SEM، یک ساختار متراکم در طول بازپخت به یک ساختار منطقه برهنه تبدیل شد. بازتاب فیلم های TiN حداقل را در ناحیه مرئی نشان می دهد و بیانگر افزایش قابل توجه بازتاب در ناحیه مادون قرمز است. مقدار انرژی فاصله باند نوری با افزایش دمای بازپخت افزایش می یابد، در حالی که مقاومت الکتریکی و مقادیر سختی کاهش می یابد.
کلیدواژه‌ها
موضوعات
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